Sputtering Targets
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Stock No.
NS6130-10-1404
CAS
12036-10-1
MSDS
Specifications
COA
Catalogue
Ruthenium Oxide Sputtering Target
RuO2, Purity: 99.99%, Dia: 50.8mm
Ruthenium Oxide Sputtering Target
Available Pack Size: 1Pc, 2Pcs, 5Pcs, 10Pcs & Bulk orders
| Product | Ruthenium Oxide Sputtering Target | |
| Stock No | NS6130-10-1404 | |
| CAS | 12036-10-1 | Confirm |
| Purity | 99.99% | Confirm |
| Diameter | 50.8 mm ± 1mm | Confirm |
| Thickness | 3 mm ± 0.5mm | Confirm |
| Molecular Formula | RuO2 | Confirm |
| Molecular Weight | 133.07g/mol | Confirm |
| Form | Solid | Confirm |
| Density | 6.97g/cm³ | Confirm |
| Melting Point | 1200°C | Confirm |
| Shape | Round | Confirm |
| Backing Plate | Copper (as per customer requirement) | |
| Size and Shape | Targets Diameter and thickness can be according to Customer Requirement | |
| Conclusion | The specifications Confirm with enterprise standard | |
| Quality Control | Each Lot of was tested successfully | |
| Main Inspect Verifier | Manager QC | |
Typical Chemical Analysis
| Assay | 99.99% |
| Other Metal | 85ppm |
Expert Reviews
Ruthenium Oxide Sputtering Target
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