Silicon Wafer Platinum Coated

Pt/TaOx on SiO2/Si wafer
Stock No.
NS6130-10-1152
CAS
7440-21-3
MSDS
MSDS
Specifications
Specifications
COA
COA
Catalogue

Silicon Wafer Platinum Coated

Available Pack Size: 1Pc, 2Pcs, 5Pcs, 10Pcs & Bulk orders
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Silicon Wafer P Type
ProductSilicon Wafer Platinum Coated
Stock NoNS6130-10-1152
CAS7440-21-3Confirm
StructurePt/TaOx on SiO2/Si wafer (4 inch)Confirm
FilmPt/TaOx (Platinum on Tantalum Oxide)Confirm
Orientation of Film(111)Confirm
Thickness of PT Film200nm (Sputtering method)Confirm
Thickness of TaOx Film40nm (Sputtering method)Confirm
SubstrateSiO2/Si WaferConfirm
Thickness of SiO2300nm (Thermal Oxidiation)Confirm
Silicon WaferSingle Side PolishedConfirm
Diameter4” (100mm)Confirm
Thickness of Si525 ± 20µmConfirm
Crystal Orientation<100>Confirm
TypeP (Boron Doped)Confirm
Growth MethodCZ PrimeConfirm
Resistivity1 ~ 10 Ὼ.cmConfirm
Quality ControlEach Lot of was tested successfully
Main Inspect VerifierManager QC

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Silicon Wafer Platinum Coated

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