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Silicon/Cellulose Wafers
Silicon Wafer Platinum Coated
Pt/TaOx on SiO2/Si wafer
Silicon Wafer Platinum Coated
Available Pack Size: 1Pc, 2Pcs, 5Pcs, 10Pcs & Bulk orders
Silicon Wafer P Type
| Product | Silicon Wafer Platinum Coated | |
| Stock No | NS6130-10-1152 | |
| CAS | 7440-21-3 | Confirm |
| Structure | Pt/TaOx on SiO2/Si wafer (4 inch) | Confirm |
| Film | Pt/TaOx (Platinum on Tantalum Oxide) | Confirm |
| Orientation of Film | (111) | Confirm |
| Thickness of PT Film | 200nm (Sputtering method) | Confirm |
| Thickness of TaOx Film | 40nm (Sputtering method) | Confirm |
| Substrate | SiO2/Si Wafer | Confirm |
| Thickness of SiO2 | 300nm (Thermal Oxidiation) | Confirm |
| Silicon Wafer | Single Side Polished | Confirm |
| Diameter | 4” (100mm) | Confirm |
| Thickness of Si | 525 ± 20µm | Confirm |
| Crystal Orientation | <100> | Confirm |
| Type | P (Boron Doped) | Confirm |
| Growth Method | CZ Prime | Confirm |
| Resistivity | 1 ~ 10 Ὼ.cm | Confirm |
| Quality Control | Each Lot of was tested successfully | |
| Main Inspect Verifier | Manager QC | |
